/batch /page,,,500,132 /prep7 /title,type-R,XXXfile,BeO-bridge,Qamp/Qsi=XXXqamp/XXXqsiW,Tcool=XXXh2o,no convection c***********rphi-center-tap 97-March configuration********* c******* flat cooling plate, narorow stand******** c******* effect of bonding wires included (96.8.24)****** c******* new thermal conductivities, t(glue)=0.05->0.1 mm (96.8.26) c******* 1 side cooling, PG base board of .5mm ********** c******* fineri three division near the z edge of the hybrid****** c******* divide hybrid into two in height(y) ********** c******* anisotropic conductivity of PG introduced (96.8.26) **** c****** airgap between bridge and cooling plate***** c****** glue3 under the chips ************ c******* extend PG right side to 119mm (tongue 109mm)***** c****** R model (Mar 22, 1997)***** disp=0 pchp1=XXXqamp*1.3/3.0 ! power in 1st chip (Watt) per side(6 chips) pchp2=XXXqamp*0.2/3.0 ! power in 2nd chip (Watt) per side(6 chips) tpwsi=XXXqsi ! total power dissipation in Si th2o=XXXh2o ! cooling cahnnel water temperature on A side hcef=0.000008 ! convection film coefifcient : Watt/(mm**2 K) tenv=XXXtev ! temperature of environment c****silicon, 3 dimentional model******************************* et,1,solid69 et,2,solid70 c***** material properties****************************** mp,kxx,1,0.130 ! 1. Silicon mp,kxx,4,0.0005 ! 4. glue mp,kxx,5,0.001 ! insulator mp,kxx,6,0.00025 ! hybrid (effective) mp,kxx,7,0.280 ! Beryllia (BeO) mp,kxx,8,0.0000245 ! air mp,kxx,9,0.0015 ! quarz mp,kxx,11,0.130 ! VLSI chip1 mp,kxx,12,0.130 ! VLSI chip 2 mp,kxx,15,0.00220 ! effective bonding wires (150/50.96=2.94*0.3/0.4) mp,kxx,17,1.300 ! PG conductivity in the plane mp,kzz,17,1.300 ! PG conductivity in the plane mp,kyy,17,0.0250 ! PG conductivity out of the plane c******************** geometry *********************************** tbase=0.35 ! baseboard thickness tsilicon=0.300 ! silcion thickness lsilicon=64.0 ! single wafer wsilicon=63.6 ! silicon width tchp=0.35 ! chip height lchp1=4.0 lchp2=5.5 wchp=7.2 c***************** generation of heat in amplifier vchp1=6*tchp*lchp1*wchp qgen1=pchp1/vchp1 ! generated power in unit volume vchp2=6*tchp*lchp2*wchp qgen2=pchp2/vchp2 ! generated power in unit volume c**** generation of heat in silicon bulk voltsi=100 *if,tpwsi,gt,0,then c*******ssi=2.*2.*lsilicon*wsilicon ! 2 for top/bottom pwsi=tpwsi*1.E-6 r0=voltsi*voltsi/(pwsi*tsilicon) *else voltsi=1.0e-5 r0=1.e30 *endif eg=1.23 kb=8.617e-5 T=263 rm10=r0/((T/273)**2*exp(-eg/(2*kb)*(1/T-1/273))) T=283 r10=r0/((T/273)**2*exp(-eg/(2*kb)*(1/T-1/273))) T=293 r20=r0/((T/273)**2*exp(-eg/(2*kb)*(1/T-1/273))) T=303 r30=r0/((T/273)**2*exp(-eg/(2*kb)*(1/T-1/273))) T=313 r40=r0/((T/273)**2*exp(-eg/(2*kb)*(1/T-1/273))) T=323 r50=r0/((T/273)**2*exp(-eg/(2*kb)*(1/T-1/273))) T=333 r60=r0/((T/273)**2*exp(-eg/(2*kb)*(1/T-1/273))) T=343 r70=r0/((T/273)**2*exp(-eg/(2*kb)*(1/T-1/273))) T=353 r80=r0/((T/273)**2*exp(-eg/(2*kb)*(1/T-1/273))) T=363 r90=r0/((T/273)**2*exp(-eg/(2*kb)*(1/T-1/273))) T=373 r100=r0/((T/273)**2*exp(-eg/(2*kb)*(1/T-1/273))) mptemp,,-10,0,10,20,30,40 mptemp,7,50,60,70,80,90,100 mpdata,rsvx,1,,rm10,r0,r10,r20,r30,r40 mpdata,rsvx,1,7,r50,r60,r70,r80,r90,r100 c***** no T dependence for a while c******mpdata,rsvx,1,,r0,r0,r0,r0,r0,r0 c*****mpdata,rsvx,1,7,r0,r0,r0,r0,r0,r0 c******************define macro******************************* *dim,dz,array,30 *set,dz(1),-4.0,-4.0,-1.0,-3.5,-3.5,-1.0,-1.0 *set,dz(8),-1.0,-0.6,-2.4,-3.0,-1.8,-3.04,-7.2 *set,dz(15),-3.04,-7.2,-3.04,-7.2,-3.04,-7.2,-3.04 *set,dz(22),-1.8,-3.0,-2.4,-0.6,-1.0,-1.0,-1.0 *set,dz(29),-3.5,-3.5 *creat,znode,mac n1=arg1 n2=arg2 *do,i,1,30 ngen,2,1000,n1,n2,,0.,0.,dz(i) n1=n1+1000 n2=n2+1000 *enddo *end c****--------------------------------------------------------------- *create,solid,mac y1=arg1 y2=y1+1 y4=arg2 y3=y4+1 y5=y1+1000 y6=y2+1000 y7=y3+1000 y8=y4+1000 *if,arg3,le,1,then e,y1,y2,y3,y4,y5,y6,y7,y8 *else e,y1,y2,y3,y4,y5,y6,y7,y8 *repeat,arg3,1,1,1,1,1,1,1,1 *endif *end c****--------------------------------------------------------------- *create,zsolid,mac z1=arg1 z2=arg2 z3=arg3 jymax=arg5 ! repeat in height (y direction) *do,jjj,1,arg4 solid,z1,z2,z3 *if,jymax,gt,1,then zz1=z1 zz2=z2 *do,kkk,2,jymax zz1=zz1+100 zz2=zz2+100 solid,zz1,zz2,z3 *enddo *endif z1=z1+1000 z2=z2+1000 *enddo *end c******************** geometry ***************************** c********************* node creation *************************** basehalf=tbase*0.5 yyy=basehalf xxx=0.0 *do,nn,1,6 n,nn,xxx,yyy,0. xxx=xxx+5. *enddo n,7,27.5,yyy,0. n,8,30.0,yyy,0. n,9,32.0,yyy,0. n,10,34.0,yyy,0. n,11,38.0,yyy,0. n,12,42.0,yyy,0. n,13,47.0,yyy,0. n,14,52.0,yyy,0. n,15,57.0,yyy,0. n,16,62.0,yyy,0. n,17,64.0,yyy,0. n,18,64.1,yyy,0. n,19,67.0,yyy,0. ! for bonding wires (17-18) n,20,67.4,yyy,0. n,21,69.0,yyy,0. n,22,71.5,yyy,0. n,23,73.5,yyy,0. n,24,75.5,yyy,0. n,25,76.5,yyy,0. n,26,79.0,yyy,0. n,27,82.0,yyy,0. n,28,86.0,yyy,0. n,29,91.0,yyy,0. n,30,96.0,yyy,0. n,31,100.0,yyy,0. n,32,105.0,yyy,0. n,33,110.0,yyy,0. n,34,115.0,yyy,0. n,35,121.0,yyy,0. n,36,128.0,yyy,0. znode,1,36 tglue1=0.075 yyy=yyy+tglue1 hglue1=yyy ngen,2,100,1,36,,0.,tglue1,0. znode,101,136 tsilicon=0.30 yyy=yyy+tsilicon hsilicon=yyy ngen,2,100,101,136,,0.,tsilicon,0 znode,201,236 tairgap=0.20 yyy=yyy+tairgap hairgap=yyy ngen,2,100,219,230,,0.,tairgap,0. znode,319,330 tbridge=0.381 yyy=yyy+tbridge hbridge=yyy ngen,2,100,319,330,,0.,tbridge,0. znode,419,430 tglue2=0.075 yyy=yyy+tglue2 hglue2=yyy ngen,2,100,419,430,,0.,tglue2,0. znode,519,530 thybrida=0.09 * bottom of hybrid yyy=yyy+thybrida hhybrida=yyy ngen,2,100,519,530,,0.,thybrida,0. znode,619,630 thybridb=0.09 * top of hybrid yyy=yyy+thybridb hhybridb=yyy ngen,2,100,619,630,,0.,thybridb,0. znode,719,730 tglue3=0.075 yyy=yyy+tglue3 hglue3=yyy ngen,2,100,719,727,,0.,tglue3,0. znode,819,827 tchip=0.35 yyy=yyy+tchip htchip=yyy ngen,2,100,822,827,,0.,tchip,0. znode,922,927 c******* now the creation of elements ***********************8 c********* layer of 1 - 100 *********** type,2 mat,8 ! air between base and silicon zsolid,6001,6101,35,2,1 zsolid,8001,8101,11,3,1 zsolid,11001,11101,9,2,1 zsolid,13001,13101,8,3,1 zsolid,16001,16101,7,2,1 zsolid,18001,18101,6,2,1 zsolid,20001,20101,5,2,1 zsolid,22001,22101,8,3,1 zsolid,25001,25101,35,2,1 zsolid,8031,8131,5,2,1 zsolid,10032,10132,4,13,1 zsolid,23030,23130,6,2,1 zsolid,8016,8116,3,17,1 ! air near bonding zsolid,5021,5121,9,1,3 ! between Si and BeO step zsolid,27021,27121,9,1,3 mat,4 ! glue between base and silicon zsolid,8012,8112,4,3,1 zsolid,11010,11110,6,2,1 zsolid,13009,13109,7,3,1 zsolid,16008,16108,8,2,1 zsolid,18007,18107,9,2,1 zsolid,20006,20106,10,2,1 zsolid,22009,22109,7,3,1 zsolid,8019,8119,11,17,1 zsolid,8030,8130,1,15,1 zsolid,10031,10131,1,13,1 zsolid,3021,3121,9,2,1 ! glue of BeO steps zsolid,28021,28121,9,2,1 ! glue of BeO steps c********* layer of 100 - 200 *********** type,1 mat,1 zsolid,6101,6201,16,21,1 ! silicon wafer no.1 zsolid,6118,6218,18,21,1 ! silicon wafer no.2 type,2 mat,7 ! BeO steps zsolid,3121,3221,9,2,2 zsolid,28121,28221,9,2,2 c********* layer of 200 - 300 *********** mat,8 ! air between Si and BeO bridge zsolid,6221,6321,9,21,1 c********* layer of 300 - 400 *********** mat,7 ! BeO bridge zsolid,3321,3421,9,27,1 c********* layer of 400 - 500 *********** mat,4 ! glue between BeO bridge and hybrid zsolid,5421,5521,9,23,1 c********* layer of 500 - 600 - 700 *********** mat,9 ! quartz fan-in zsolid,5521,5621,1,23,3 mat,6 ! hybrid zsolid,5522,5622,8,23,2 c********* layer of 700 - 800 - 900 *********** c****** macro for chip setting *create,zchip,mac zc1=arg1 zc2=zc1+100 zc3=zc1+3 zc4=zc1+103 zc5=zc1+200 zc6=zc1+203 mat,4 ! glue under chips zsolid,zc1,zc2,2,arg2,1 zsolid,zc3,zc4,2,arg2,1 mat,11 ! CAFE chip zsolid,zc2,zc5,2,arg2,1 mat,12 ! ABC chip zsolid,zc4,zc6,2,arg2,1 *end c*********now create chips and glue zchip,9722,3 zchip,13722,1 zchip,15722,1 zchip,17722,1 zchip,19722,1 zchip,21722,3 mat,15 ! bonding wires zsolid,6219,6319,1,21,3 zsolid,6519,6619,2,21,3 c****** copy to bottom side by symmetry************************* nsel,all nsym,y,50000,all ensys,50000,,50000,all c********** PG baseboard ************************* type,2 mat,8 ! air zsolid,56001,6001,15,2,1 zsolid,58001,8001,11,2,1 zsolid,61001,11001,9,2,1 zsolid,63001,13001,8,3,1 zsolid,66001,16001,7,2,1 zsolid,68001,18001,6,2,1 zsolid,70001,20001,5,2,1 zsolid,72001,22001,8,3,1 zsolid,75001,25001,15,2,1 zsolid,56031,6031,5,5,1 zsolid,60032,10032,4,13,1 zsolid,73030,23030,6,4,1 mat,17 ! PG base board zsolid,61010,11010,5,11,1 zsolid,63009,13009,1,9,1 zsolid,66008,16008,1,6,1 zsolid,68007,18007,1,4,1 zsolid,70006,20006,1,2,1 zsolid,60022,10022,10,13,1 mat,7 ! BeO base board zsolid,58012,8012,3,3,1 zsolid,72009,22009,6,3,1 zsolid,58015,8015,1,17,1 zsolid,50016,16,6,30,1 zsolid,50022,22,9,10,1 zsolid,73022,23022,8,7,1 c****** element creation of cooling plate *********** mat,4 zsolid,50116,50016,15,2,1 mat,7 * BeO for cooling plate, just one layer zsolid,50216,50116,15,2,1 fini c***** end of PREP7 set up ******************* /solusion c******************** boundary conditions *************** c*** forced cooling at the side edge of cooling plate *********** esel,s,mat,,7 nele * nodes of selected elements nsel,r,node,,50216,50231 nsel,a,node,,51216,51231 nsel,a,node,,52216,52231 d,all,temp,th2o * constrain at th20 degree C nsel,all esel,all c*** heat generation in electronics (mat=11)************ esel,s,mat,,11 bfe,all,hgen,1,qgen1,qgen1,qgen1,qgen1 bfe,all,hgen,5,qgen1,qgen1,qgen1,qgen1 esel,s,mat,,12 bfe,all,hgen,1,qgen2,qgen2,qgen2,qgen2 bfe,all,hgen,5,qgen2,qgen2,qgen2,qgen2 esel,all nsel,all c****** heat genartion if silicon bulk by appling voltage to Si esel,s,mat,,1 nele nsel,r,loc,y,hglue1,,,1 * select nodes of y=0. d,all,volt,0. esel,s,mat,,1 nele nsel,r,loc,y,hsilicon,,,1 * select nodes of y=tsi d,all,volt,voltsi nsel,all esel,all c*********************************************************** solve finish c*********************************************************** /post1 /show,zplot,ps,,4 /view,1,1,1,1 /edge,1,1 plnsol,temp ! plot birds eye view c****/contour,1,10,0,1,9 /view,1,0,1,0 /edge,1,1 plnsol,temp ! plot top view esel,s,mat,,1 nele nsel,r,loc,y,0.,hsilicon plnsol,temp ! plot silicon only nsel,all esel,s,mat,,17 nele yyy=-basehalf nsel,r,loc,y,yyy,basehalf plnsol,temp ! plot baseboard only nsel,all esel,s,mat,,7 nele nsel,r,loc,y,hairgap,hbridge plnsol,temp ! plot BeO bridge only esel,all nsel,all /view,1,-1,0,0 /edge,1,0 /ratio,1,1,20 nsel,s,loc,x,71.0,75.0 enode,1 esel,u,mat,,8 nele plnsol,temp ! plot the cross section at amp esel,all nsel,all /ratio,1,1,1 /view,1,0,0,1 /grid,1 /yrange,0,10 /xrange,0,128 /output,zXXXfileXXXout,out *dim,aa,array,5 *set,aa(1),7201,12201,15201,19201,24201 *do,i,1,5 n1=aa(i) n2=n1+32 lpath,n1,n2 pdef,t,temp prpath,t plpath,t /noerase *enddo fini /exit,all